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Home > Anterior Cervical Plating Systems > CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
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CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating

CVD Ald Atomic Layer Deposition System for Powder Coating Plating

Customization: Available
After-sales Service: Onlin
Warranty: 1
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Product Description

📊 Basic Info.
Model NO.
CY-ALD
Type
Coating Production Line
Coating
Vacuum Coating
Certification
CE
Condition
New
Wafer Dimension
8 Inch and Below
Wafer Temperature
Rt-400c, ±0.1c
Background Vacuum
<5*10-3torr
Production Capacity
200 Sets Per Month
HS Code
8412800090
📦 Packaging & Delivery
Package Size
1200.00cm * 800.00cm * 1100.00cm
Gross Weight
280.000kg
⚙️ Product Description
CVD ALD Atomic Layer Deposition System for Powder Coating Plating

Introduction: Thermal Atomic Layer Deposition System is a single-wafer deposition system specially designed for scientific research and small-scale experiments of industrialization. It is widely used in fields of micro-electronics, nano-materials, optical films, solar batteries, etc.

Product Benefits:
Advanced software controlling system with integrated technological formulation, parameter setting, popedom setting, interlocking alarming, and state supervisory control.

ALD Films Capability:

  • Elementary Substances: Co, Cu, Ta, Ti, W, Ge, Pt, Ru, Ni, Fe…
  • Nitrides: TiN, SiN, AlN, TaN, ZrN, HfN, WN…
  • Oxides: TiO2, HfO2, SiO2, ZnO, ZrO2, Al2O3, La2O3, SnO2…
  • Others: GaAs, AlP, InP, GaP, InAs, LaHfxOy, SrTiO3, SrTaO6…

Application Fields:

  • High-k gate oxides & Storage capacitor dielectrics
  • High aspect ratio diffusion barriers for Cu interconnects
  • Pinhole-free passivation layers for OLEDs and polymers
  • Highly conformal coatings for MEMS and nanoporous structures
  • Solar battery, Flat plate display, and Optical thin-films
📋 Technical Parameters
  • Wafer Dimension8 inch and below
    Wafer TemperatureRT-400ºC, Precision ±0.1ºC
    Precursor LinesThree precursor lines (Optional more)
    Line/Source TemperatureRT-200ºC, Precision ±0.1ºC
    ALD ValveSwagelok ALD swift valve
    Background Vacuum<5*10-3 Torr
    Gas Carrier SystemN2 or Ar
    Growing ModeConsecutive or interval deposition mode
    Controlling SystemPLC plus touch screen or display
    Deposition Heterogeneity<±1%
    Instrument Dimension600mm x 600mm x 1100mm
    🖼️ Detailed Photos
    ALD System View 1
    ALD System View 2
    ALD System View 3
    ALD System View 4
    ALD System View 5
    ALD System View 6
    Separator Banner Technical Layout Product Range Banner Decorative Line
    Frequently Asked Questions
    Are you a professional laboratory instrument manufacturer?
    Yes, we are professional laboratory instrument manufacturers with our own design team and factory, ensuring high product quality and technical expertise.
    What is your after-sales service system?
    The product warranty period is 12 months, and we provide lifetime maintenance. Our professional teams respond within 24 hours to resolve any technical issues.
    How long is the delivery time for standard and custom instruments?
    Standard stock items typically take 5-10 days. Customized instruments usually take 30-60 days depending on the specific technical requirements.
    Can you accommodate different power supply standards?
    Absolutely. We supply transformers and plugs tailored to your local requirements and national power standards.
    What payment methods are accepted?
    We support T/T, L/C, D/P, and other major payment methods. Trade Guarantee is also recommended.
    How is the equipment packaged for shipping?
    We use standard export fumigation wooden box packaging. Delivery can be arranged via express, air, or sea shipping based on your needs.

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